JPH0446638B2 - - Google Patents
Info
- Publication number
- JPH0446638B2 JPH0446638B2 JP13431788A JP13431788A JPH0446638B2 JP H0446638 B2 JPH0446638 B2 JP H0446638B2 JP 13431788 A JP13431788 A JP 13431788A JP 13431788 A JP13431788 A JP 13431788A JP H0446638 B2 JPH0446638 B2 JP H0446638B2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- vibrator
- ultrasonic
- bottom plate
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 claims description 45
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 16
- 239000007789 gas Substances 0.000 claims description 13
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 10
- 239000011261 inert gas Substances 0.000 claims description 6
- 230000010355 oscillation Effects 0.000 claims description 6
- 230000001902 propagating effect Effects 0.000 claims description 3
- 230000000694 effects Effects 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 230000006866 deterioration Effects 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 229910021645 metal ion Inorganic materials 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010865 sewage Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13431788A JPH01304089A (ja) | 1988-06-02 | 1988-06-02 | 超音波洗浄装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13431788A JPH01304089A (ja) | 1988-06-02 | 1988-06-02 | 超音波洗浄装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01304089A JPH01304089A (ja) | 1989-12-07 |
| JPH0446638B2 true JPH0446638B2 (en]) | 1992-07-30 |
Family
ID=15125477
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13431788A Granted JPH01304089A (ja) | 1988-06-02 | 1988-06-02 | 超音波洗浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01304089A (en]) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2789178B2 (ja) * | 1995-08-03 | 1998-08-20 | 株式会社国際電気エルテック | 超音波洗浄装置 |
| WO2008136537A1 (ja) * | 2007-05-01 | 2008-11-13 | Nippon Steel Corporation | 鋼板の洗浄方法及び鋼板の連続洗浄装置 |
| CN109394374B (zh) * | 2018-12-30 | 2024-05-10 | 常州赛乐医疗技术有限公司 | 一种根管荡洗器 |
-
1988
- 1988-06-02 JP JP13431788A patent/JPH01304089A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01304089A (ja) | 1989-12-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |